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filingDate 2003-07-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2005-09-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2005-09-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-6942224-B2
titleOfInvention Inflatable seal
abstract An inflatable seal member for providing a fluid-tight seal. The inflatable seal member is particularly well suited to sealing a processing chamber having pressurized fluids therein. Outward forces (exerted by air pressure) to the inner surfaces of the seal member counteract inward forces (exerted by fluid pressure) to the outer surfaces of the seal member.
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Total number of triples: 45.