| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c72d118f5664072de841f9c5c34b9d99 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-73265
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-48091 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-225 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-22 |
| filingDate |
2003-06-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2005-09-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f4e1bf1f61508004bd067aa4413cc8e9 |
| publicationDate |
2005-09-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6938482-B2 |
| titleOfInvention |
Humidity sensor element containing polyphenylsulfone |
| abstract |
A humidity sensor element for a humidity sensing device includes a rigid, p doped silicon substrate, a non-porous terminal on one side of the substrate, a porous terminal on a second side of the substrate, and a layer of polyphenylsulfone between the porous terminal and the substrate. The sensor elements displays improved linear response with humidity changes and very low hysteresis. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9655787-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-101438149-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7726653-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012130330-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1992941-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9018060-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009056439-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I420101-B |
| priorityDate |
2003-06-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |