| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9019c0ce5cb7b82c85e121f6cac86dce |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D3-66 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D3-66 |
| filingDate |
2000-11-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2005-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_328278288c27fc2ccc13e48c1c56b82b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1ad6ddf90e1ac61e51253cb0cc84c59b |
| publicationDate |
2005-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6936155-B1 |
| titleOfInvention |
Method for electroplating of tantalum |
| abstract |
The present invention provides a method of electrolytically forming a tantalum film by using a molten-salt electrolytic bath having a low temperature. The electrolytic bath includes a molten salt containing tantalum pentachloride, alkylimidazolium chloride, and an alkali metal or alkali earth metal fluoride such as lithium fluoride. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8340855-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2008127110-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2006061081-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8022004-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009242414-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1983079-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008093222-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8747148-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8124556-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9512530-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103060863-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009288856-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009288958-A1 |
| priorityDate |
2000-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |