| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_80787665b837ed3eb503bbcd27c0043a |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T279-23
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-3025 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6831
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6835
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6833
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67109 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 |
| filingDate |
2003-05-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2005-05-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fc7f7883c7ebbf6fb06b5a0f2341e211
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_094884918cbb9828ffbe6684d745a7f1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bc9b1a5e50823da33c6d33264f2baa41
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8ac6b35ddcf246e64a71b1b5b41c95cd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cebcbad5dc6e645570a45c20abb64d37
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8a4b7c564f7d95d0a94ecb1e6263dea0 |
| publicationDate |
2005-05-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6899789-B2 |
| titleOfInvention |
Method of holding substrate and substrate holding system |
| abstract |
A method and system of holding a substrate to decrease foreign substances on the back surface thereof. The substrate holding system includes a ring-shaped leakage-proof surface having a smooth surface on the specimen table corresponding to the periphery of the substrate, contact holding portions within the periphery of the substrate, and electrostatic attraction means for fixing the substrate by contacting the back surface thereof to the ring-shaped leakage-proof surface and the contact holding portions. The substrate contacts a cooling surface at the ring-shaped leakage-proof surface and the contact holding portion placed on a position inside the ring-shaped leakage-proof surface. The back surface of the substrate and the cooling surface do not contact each other in the large portion of the remaining area. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010282603-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10431467-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10964545-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008247114-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014202636-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006144584-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006011139-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I425591-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7913752-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8925608-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10147610-B1 |
| priorityDate |
1993-09-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |