| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a3d52eacd83e723ebd2ca61b598586c2 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-72 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-72 |
| filingDate |
2003-07-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2005-04-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_af9bcd4fcca3d996b4d708a23c010a99
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_27ab47f00e999231cfa20a0b813e6fa2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9e98606586ea568ade61e9544a3e63ee
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1ebd41a0e56d04eebbe7f2ffb65ff294 |
| publicationDate |
2005-04-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6885190-B2 |
| titleOfInvention |
In-situ metalization monitoring using eddy current measurements during the process for removing the film |
| abstract |
A method for measuring conductance of a sample using an eddy current probe with a sensing coil. The method includes N repetitions of measuring first and second voltage pairs including in-phase and quadrature components of an induced AC voltage in the sensing coil, calibrating the first signal based on the measured second signal at a different separation from the sample and reference material, determining a conductance function relating conductance with location along the selected curve, processing the calibrated first voltage pairs to generate a lift-off curve, determining an intersection voltage pair representing intersection of the lift-off curve with a selected curve, and determining the conductance of the sample from the intersection voltage pair and the conductance function. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7777483-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8337278-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008186022-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8502979-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7626383-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7751046-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8179530-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7560920-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009149115-A1 |
| priorityDate |
1999-12-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |