| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_97411dac2a9aceddcf1140e97aad0a57 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C12N2501-395
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D17-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C12N2506-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C12N2500-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C12N2501-39
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D7-123
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C12N2501-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61K35-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C12N2500-25
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C12N2500-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C12N2500-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D5-08 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D17-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D17-001
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2885 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D5-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/A61K35-12 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C28-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D7-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D17-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-288 |
| filingDate |
2001-10-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2005-03-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a8b99944e2afee68fe98b1438bde0c9a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ec42d28710bf814854f5e5ef5e8ec5e9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a5099c5b653eca5c489cf7c5d591a5f6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4dd104db6370f648277cddd6ae56c45f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8bd5e466c217d9b47993f579e562965e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_822ae2153e72d5cd72683d196d50d59d |
| publicationDate |
2005-03-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6869510-B2 |
| titleOfInvention |
Methods and apparatus for processing the surface of a microelectronic workpiece |
| abstract |
A reactor for plating a metal onto a surface of a workpiece is set forth. The reactor comprises a reactor bowl including an electroplating solution disposed therein and an anode disposed in the reactor bowl in contact with the electroplating solution. A contact assembly is spaced from the anode within the reactor bowl. The contact assembly includes a plurality of contacts disposed to contact a peripheral edge of the surface of the workpiece to provide electroplating power to the surface of the workpiece. The contacts execute a wiping action against the surface of the workpiece as the workpiece is brought into engagement therewith The contact assembly also including a barrier disposed interior of the plurality of contacts. The barrier includes a member disposed to engage the surface of the workpiece to assist in isolating the plurality of contacts from the electroplating solution. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10092933-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8377268-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9512538-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9746427-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011233056-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10066311-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9988734-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010155254-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10053793-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11512408-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8398831-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10087543-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10087545-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10982346-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10416092-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8172992-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10053792-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10538855-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011181000-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9476139-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9221081-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10435807-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006226000-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7645366-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9228270-B2 |
| priorityDate |
1998-07-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |