| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_aea8583efc4aa4e2a9706d789804d37b |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S438-954 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-3192
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-291 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-29
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-31 |
| filingDate |
2002-09-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2005-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_917295e846faea2e4af0a38eeabfb622
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3e37287d8e03e6c6623e96aba9c8d19a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bb7af47e39bf95cd686632a5fa99ac96
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f0f02117b9819c5f4ea05f7c80377a41
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_93c6bb2e18e3f5bf6a85a4b78fe2f562
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_95318330f500d96072c89dd2644007ea |
| publicationDate |
2005-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6867466-B2 |
| titleOfInvention |
Memory device and method for forming a passivation layer thereon |
| abstract |
A memory device with an improved passivation structure. The memory device includes a semiconductor substrate with memory units thereon, an interconnect structure over the surface of the semiconductor substrate to connect with the memory units, and a passivation structure over the surface of the interconnect structure. The passivation structure comprises a dielectric layer over the surface of the interconnect structure and a silicon-oxy-nitride (SiOxNy) layer over the surface of the dielectric layer. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103578919-A |
| priorityDate |
2002-03-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |