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publicationDate 2005-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-6866790-B2
titleOfInvention Method of making an ink jet printhead having a narrow ink channel
abstract A method of forming a fluid ejecting device such as an ink jet printing device that includes forming a plurality of fluid drop generators on a first surface of a silicon substrate, forming a partial fluid feed slot in the silicon substrate by deep reactive ion etching, and forming a fluid feed slot by wet etching the partial fluid feed slot.
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015206761-A1
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