Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23H5-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25F7-00 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23H5-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25F7-00 |
filingDate |
2002-03-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2005-01-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b34bf0b224882ab1f3f3303a465896b9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b23fd7a7860a7797279de6e0e4a96d3a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e94ffa6073d3a28599d3806928d97372 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_57370adea0210bace6100ba48ef43d1d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_46feee75ec2a15fc3cb4aa72b0d42df6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3812b701d883ae8a20d95d110caf0394 |
publicationDate |
2005-01-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-6841057-B2 |
titleOfInvention |
Method and apparatus for substrate polishing |
abstract |
A method and apparatus are provided for polishing a substrate surface. In one aspect, an apparatus for polishing a substrate includes a conductive polishing pad and an electrode having a membrane disposed therebetween. The membrane is orientated relative the conductive pad in a manner that facilitates removal of entrained gas from electrolyte flowing towards the conductive pad. The apparatus may be part of an electro-chemical polishing station that may optionally be part of a system that includes chemical mechanical polishing stations. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008166958-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110004484-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7686935-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006254927-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7344432-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009277802-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9004981-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008142375-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007099552-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005067288-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007099545-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7407433-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7416648-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011300785-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11705354-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110004484-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7651384-B2 |
priorityDate |
2002-03-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |