| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_36f8253f3d0d59bcd9259217d4385d10 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-49813
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T83-0581
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-49222
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01P2015-0828
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-49204
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-49155
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-49126
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-49798
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T83-02 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-007
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01P1-023
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00888 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-301
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01P15-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01P1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-84 |
| filingDate |
2002-06-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2005-01-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cd805fb476756318ccf5cd5b2bae3223
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_abacf84a2c3431079a08bcd3461f3a5c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6b6b3f62a74ca749857ce93f1ba0f438
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fd2209e9d49b65e145eaf54c24f80688 |
| publicationDate |
2005-01-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6839962-B2 |
| titleOfInvention |
Method of producing micromechanical structures |
| abstract |
A micromechanical structure is described which is disposed on a base body and requires protection from environmental influences by a covering body. Furthermore, electrical contacts are necessary for establishing contacts for the micromechanical structure. By skillfully carrying out a sawing-into operation and a sawing-through operation, it is possible to expose the electrical contact. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11040872-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10435292-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003104651-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7065867-B2 |
| priorityDate |
1999-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |