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filingDate 2004-01-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2005-01-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b6e9c51c906367ff093c7cac91926ae5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_99f007734fa7ec0dc4d719294d555b96
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publicationDate 2005-01-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-6838573-B1
titleOfInvention Copper CVD precursors with enhanced adhesion properties
abstract This invention relates to copper(+1)(β-diketonate)(L) and related copper complexes such as copper (+1)(β-ketoiminate)(L) represented by the formula: n n nwherein X represents O or NR 9 , R 1 and R 3 are each independently comprised of the group C 1-8 alkyl, C 1-8 fluoroalkyl, aryl, C 1-8 alkoxy, and C 1-8 alkyl ethers and R 2 is H, C 1-8 alkyl, C 1-8 alkoxy, and halogen, R 9 is C 1-8 alkyl, C 1-8 fluoroalkyl, phenyl, alkylphenyl, trialkylsilyl, and L represents a ligand having the structure:n n(R 4 )(R 5 )C═(R 6 )(R 7 ) or R 4 —C≡C—R 7 n nwherein R 4 , is comprised of the group C 1-8 alkanol, C 1-8 alkoxyalkanol, C 1-8 unsaturated alkoxyalkanol, trialkylsilanol, C 1-8 aalkylamine, phenylamine; R 5 , R 6 , and R 7 are comprised of the group H, C 1-8 alkyl, triakylsilyl, alkoxy or phenyl.
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priorityDate 2004-01-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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