| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2885
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67155
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-241 |
| classificationCPCInventive |
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http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D21-12
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http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68785
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http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67126 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-24
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| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D7-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D21-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-687 |
| filingDate |
2000-10-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2005-01-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0ef4a3c7ed11cb674a0e451c45b0886f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_72cdf888da00e21c42c9a89487d99073
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fbe0f1271032cdb3adc679be6ec53481
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1febad08d51559727fa0711cabe73c3f |
| publicationDate |
2005-01-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6837978-B1 |
| titleOfInvention |
Deposition uniformity control for electroplating apparatus, and associated method |
| abstract |
A method and associated apparatus for electro-chemically depositing a metal film on a substrate having a metal seed layer. The apparatus comprises a substrate holder that holds the substrate. The electrolyte cell receives the substrate in a processing position. The actuator is connected to the substrate holder and adjustably positions the substrate relative to the electrolyte cell. The method involves electro-chemically depositing a metal film on a substrate having a metal seed layer comprising disposing the substrate in an electrolyte cell that is configured to receive the substrate. The method comprises adjustably positioning the substrate relative to the electrolyte cell. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014214207-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7846306-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10381254-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11264262-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006102467-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014087073-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10444544-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8831781-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008118631-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011073483-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014316574-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9945045-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8798795-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004016648-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9114539-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9632059-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190060985-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9274395-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015321357-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017008170-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9452534-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006201814-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105789080-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9481085-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9594284-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105789080-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7436526-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9207515-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012215357-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11542627-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005092601-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10197881-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014374031-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005092602-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012215356-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9482880-B1 |
| priorityDate |
1999-04-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |