http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6835617-B2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c3a2f00e72ba6e4c09b6da573427fbed |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-90 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-84 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| filingDate | 2003-02-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2004-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6ef580361037a184f6bc856d56c759e1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ef3ff0be7f09460bf1aade6b6bd26f7c |
| publicationDate | 2004-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-6835617-B2 |
| titleOfInvention | Methods of forming hemispherical grained silicon on a template on a semiconductor work object |
| abstract | The present invention provides a method of preparing a surface of a silicon wafer for formation of HSG structures. The method contemplates providing a wafer having at least one HSG template comprising polysilicon formed in BPSG, the HSG template being covered by silicon dioxide. The wafer is treated with a cleaning agent to clean the surface of the wafer. Next, the wafer is treated with a conditioning agent. The conditioning agent removes native oxide from the HSG template without excessively etching structural BPSG. Preferably, the conditioning agent also removes a thin layer of polysilicon on the HSG template. The wafer is then transferred to a process chamber for HSG formation. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003034515-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7023039-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003034513-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6949427-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005051082-A1 |
| priorityDate | 1999-05-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 59.