| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1af8df51ce24ca931ae718fb747f6aa0 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T156-19
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T156-1374
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T156-1906 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67092 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-265
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-301 |
| filingDate |
2002-05-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2004-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dbf3615ba5f0eb07d4b30c10c7b7a26a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_19d7dfcdb94ce4a01270b65959441a88
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7130ec62170990547d002b91af02f4a3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b954a91563e76939b14255500a6ea60b |
| publicationDate |
2004-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6833312-B2 |
| titleOfInvention |
Plate member separating apparatus and method |
| abstract |
This invention is to support a plate member such as a bonded substrate stack in a horizontal state without coming into contact with one surface of the member and also to efficiently progress separation. Separation is executed while arranging a bonded substrate stack ( 50 ) generated by bonding a seed substrate ( 10 ) to a handle substrate ( 20 ) such that the seed substrate ( 10 ) remains on the lower side. At the first stage, the peripheral portion is separated while causing a first substrate support section ( 101 ) to chuck and support the central portion of the lower surface of the bonded substrate stack ( 50 ). Then, at the second stage, the central portion is separated while causing a second substrate support section ( 102 ) to support the lower peripheral portion and side of the bonded substrate stack ( 50 ). |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8536448-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012168091-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9028628-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7406994-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004144487-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8518724-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8932432-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7189304-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009277379-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008268753-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007122926-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8268645-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9058974-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8435804-B2 |
| priorityDate |
2001-05-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |