http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6818566-B2

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_aa67eb74ea5b96d9f8f2cfdb3b025770
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4405
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B7-0035
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61P31-04
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
filingDate 2002-10-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2004-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3a62d17acc1100f9212645732391b84a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c944745453f40a5730c485697546150f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_17a2a4e7c8764a0e969bbd8835dfd70a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d5d01438ff8505736d88ed1871dbc7eb
publicationDate 2004-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-6818566-B2
titleOfInvention Thermal activation of fluorine for use in a semiconductor chamber
abstract A method and system for thermally activating a oxidizing cleaning gas for use in a semiconductor process chamber cleaning process. The oxidizing cleaning gas is thermally activated by reacting the oxidizing cleaning gas with heated inert gas. The resulting thermally activated oxidizing cleaning gas does not readily deactivate, thus providing enhanced cleaning capabilities.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11430640-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11430674-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11450529-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11572620-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11694892-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11688603-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11398382-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-D965044-S
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11390946-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11767589-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-D975665-S
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-D965524-S
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11769670-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11401605-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11393690-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11769682-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11527403-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-D947913-S
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11530876-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11530483-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11695054-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11396702-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11532757-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11443926-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11482412-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11776846-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11411088-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11274369-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11387106-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11680839-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11682572-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11676812-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11685991-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11521851-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11378337-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11390945-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11515188-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11515187-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11476109-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11315794-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11339476-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11664267-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11345999-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11749562-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11674220-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11361990-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11629407-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11649546-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11658035-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11626316-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006254613-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11626308-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11664245-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11664199-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11387120-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11746414-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11742189-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11637011-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11658029-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11295980-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11742198-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11639811-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11637014-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11296189-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11424119-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11495459-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11306395-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11562901-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11615980-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11414760-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11639548-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11492703-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11644758-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11646197-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11646184-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11646205-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11646204-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11615970-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11499226-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11499222-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11643724-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11501973-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11501968-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11482533-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11482418-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11488854-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11488819-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11610774-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11610775-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11605528-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11557474-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11725280-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11355338-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005082002-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11735422-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11735414-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11735445-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11587814-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11587821-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11587815-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11551912-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11718913-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11594600-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11473195-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11551925-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11594450-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11390950-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11286558-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11437241-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11410851-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11725277-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-D990534-S
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-D990441-S
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-D979506-S
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11453943-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11453946-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-D980813-S
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11705333-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-D981973-S
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-D980814-S
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11447864-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11447861-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11342216-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11417545-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11581186-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11781221-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11581220-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11781243-B2
priorityDate 2002-10-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5403434-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5868852-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5861065-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6511608-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-8911905-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6375756-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5297959-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6022602-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5817578-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0731497-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6194038-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6242347-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6379574-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6527910-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6095158-A
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23968
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11638
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127401213
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419577374
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419516085
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9989226
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419545752
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID135942679
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6431
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID17358
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419522015
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6393
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24637
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21910289
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451818717
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129327014
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2124
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419546728
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16212546
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14917
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559511
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6432
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID84512
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24524
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419554239
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453772935
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419520437
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559168
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458357694
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23987
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6430
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID412550040
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID935
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411556313
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419523852
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24553
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419556970
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID83674
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559562
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419527022
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129094243
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3084099
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID947
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419520722
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24261
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449779615
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID93091
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457707758
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID727
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559362
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6392
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129602314
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129120217
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419523397
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID313
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419517548
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559516

Total number of triples: 222.