| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S134-902 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76849
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-288 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-288 |
| filingDate |
2001-05-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2004-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4149d924e371982354fed77ef7e6762a |
| publicationDate |
2004-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6818066-B2 |
| titleOfInvention |
Method and apparatus for treating a substrate |
| abstract |
A system and method for treating a substrate by integrating the annealing of a metal-containing layer on a substrate as part of a chemical mechanical polishing process. In one embodiment, a system for treating a substrate generally includes an annealing station incorporated into a chemical mechanical polishing processing system that includes a deposition station utilized to form a metal-containing layer on the substrate. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7582565-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8211242-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008166885-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008314870-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003164181-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7183181-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8398458-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11749552-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10500691-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006073703-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009277802-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006231018-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008156360-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004025911-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I757323-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7256111-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8522799-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8758522-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010003902-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005164497-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7686935-B2 |
| priorityDate |
2000-06-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |