http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6811931-B1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_652f07cd89fb027a4e6ea76e1912e293 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-54 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-48 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-58 |
| classificationIPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-54 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-48 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-68 |
| filingDate | 1999-10-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2004-11-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9f101414ae80ebc355092e6ea5d73ab1 |
| publicationDate | 2004-11-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-6811931-B1 |
| titleOfInvention | Photomask original form having layer for protecting film surface and method for preparing the same, and protective layer-forming liquid for photomask original form |
| abstract | A photomask plate with a film surface protective layer is characterized in that a protective layer forming solution is prepared by mixing a main constituent comprising a two-liquid cross-linked antifouling surface coating agent, prepared by combining a mixed resin of a fluororesin and an acrylic resin in a solvent mixture of n-butyl acetate, methyl ethyl ketone (MEK) and methyl isobutyl ketone (MIBK), with a cross-linking curing agent, prepared by mixing a polyisocyanate prepolymer and ethyl acetate, and a diluent comprising n-butyl acetate, methyl ethyl ketone (MEK) and cellosolve (ethylene glycol monoethyl ether) acetate. This protective layer forming solution is applied to a film surface of a photomask plate photosensitive emulsion layer produced by forming the film surface of the photosensitive emulsion layer (an emulsion photomask) on a substrate. The protective layer forming solution is then aged to form a film surface protective layer in a laminated manner. The resulting inexpensive and durable photomask is protected from being soiled or marked while having minimal reduction in ultraviolet light transmittance. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011008733-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10584264-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8420281-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8748060-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8563221-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103019028-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103019028-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9096712-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9051423-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011027702-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8663874-B2 |
| priorityDate | 1999-10-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 39.