| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_36d1d9c59848bff6ad5f55923d1290f5 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S438-949
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S438-942
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S438-945
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S438-947
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S438-948 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76802
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-405
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-32 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-339
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-49
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-423
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8238
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-092 |
| filingDate |
2003-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2004-08-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8e0d2d43153c673bce1fc0343b1817f6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2bba413ebdb3b6364d6ed1ba1c2e1464
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9f49c9524f21b2fc229d2331c04b6cef
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3876ea232006268bb305daffd76dd636 |
| publicationDate |
2004-08-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6780781-B2 |
| titleOfInvention |
Method for manufacturing an electronic device |
| abstract |
A method for manufacturing an electronic device is provided. In one example of the method, the method prevents deformation of a resist mask caused by the irradiation of exposure light. The resist mask has a resist as an opaque element, and can afford mask patterns undergoing little change even with an increase in the number of wafers subjected to exposure processing. The resist mask maintains a high dimensional accuracy. A photomask pattern is formed using as an opaque element a resist comprising a base resin and Si incorporated therein or a resist with a metal such as Si incorporated thereby by a silylation process, to improve the resistance to active oxygen. The deformation of a resist opaque pattern in a photomask is prevented. The dimensional accuracy of patterns transferred onto a Si wafer is improved in repeated use of the photomask. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010086876-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009275193-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019086809-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006105476-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7833905-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7985678-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8003537-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011021022-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8568959-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7012031-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005153466-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005233588-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008038916-A1 |
| priorityDate |
2002-05-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |