| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0f705f295f4ba571f5311e5ef1b57807 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R3-00 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-07378 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R3-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073 |
| filingDate |
2001-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2004-07-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4644588d0e92ab6e6ac1cdf409ee7b66 |
| publicationDate |
2004-07-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6765400-B2 |
| titleOfInvention |
Inspection apparatus and probe card |
| abstract |
An object of the present invention is to provide an inspecting device equipped with a probe card capable of inspecting an object to be inspected appropriately even at heating or cooling time. The inspecting device of the present invention is an inspecting device equipped with a performance substrate provided with a terminal for inspection; a contactor substrate provided with a probe contacting an object to be inspected; and a probe card intervening between the probe of conductor substrate and a terminal of performance substrate, wherein the probe card is a multi-layered substrate in which a resin thin film is laminated on a ceramic board. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10705122-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011050265-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7952372-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009188707-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009051041-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008136436-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010031504-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8242382-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8536890-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8570056-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8378705-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8269514-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011080186-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010321054-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010321053-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011199111-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010327897-A1 |
| priorityDate |
2000-07-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |