| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1a34d7d2e0d09a58cb7bf4a04c81162e |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-49826 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B25-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45563
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67109
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-455 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B25-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-04 |
| filingDate |
2001-06-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2004-07-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e19a2f7060c96ead1feeb4a8d6022aa0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_84eae7d3d0c7f95bb0ac68db504e9e89 |
| publicationDate |
2004-07-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6758909-B2 |
| titleOfInvention |
Gas port sealing for CVD/CVI furnace hearth plates |
| abstract |
A method and apparatus for sealing gas ports in CVD/CVI furnaces and processes is disclosed. A fluid direction nozzle ( 160 ) is positioned between a top lip ( 101 ) of a gas inlet port ( 100 ) delivering a reactant gas (G) to a furnace compartment ( 200 ) in a CVD/CVI furnace ( 10 ) and corresponding holes ( 151 ) of a CVD/CVI process apparatus such as a hearth plate ( 150 ). The fluid direction nozzle 160 reduces leakage of reactant gases (G) and ensures a smooth transition of gas flow direction between the gas inlet port ( 100 ) and the corresponding holes ( 151 ). CVD/CVI process times are significantly reduced with the use of the reusable/replaceable flow direction nozzles ( 160 ). |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010009302-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7985066-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9453648-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8560127-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009308372-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8123518-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8668491-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004211364-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10018291-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009293867-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008213710-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8764435-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7644712-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10802459-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009297997-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10337747-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011159210-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8591221-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007275339-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7771194-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011223551-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008124667-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8070481-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9316413-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9645589-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8876524-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007117056-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10094593-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8512035-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9140398-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007256636-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6846514-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8545214-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7748375-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9032950-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007101984-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10837109-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7811085-B2 |
| priorityDate |
2001-06-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |