| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_73ebc284a55d5daf0e209d6186c9e65c |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-034 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B26-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00182 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B26-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B3-00 |
| filingDate |
1999-10-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2004-06-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ce8e4a8d662140aba2f5be422094e77d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0c71ed2cea3e583f0103568430cf23b6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5a01bcda5528d375be6752fd4ec68ee5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_27b8f0433b393d269afff82bb0014ba1 |
| publicationDate |
2004-06-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6757455-B1 |
| titleOfInvention |
Micromachine and manufacturing method therefor |
| abstract |
A micromachine and a manufacturing method are provided for a micromachine that has a dynamic first microstructured portion serving as a drive portion, and a static second microstructured portion adapted to perform a switching function and which functions as an optical element. The second microstructured portion can be manufactured at least without complex steps, such as a silicon process, by forming a static second microstructure on the dynamic first microstructured portion, or in such a way as to be overlaid thereon by mold transfer. Thus, the microstructured portion of a complex shape can be easily formed with good reproducibility. When a plurality of elements are arranged in an array, similarly as in the case of a spatial light modulator, the stable reproduction thereof is achieved by the mold transfer. Thus, as compared with the case of manufacturing all elements in a silicon process, the probability of an occurrence of a defect is very low. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9073179-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9657207-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113884191-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009267248-A1 |
| priorityDate |
1998-10-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |