http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6756087-B2

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classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B5-201
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classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-1337
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B5-20
filingDate 2002-07-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2004-06-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5d6b97312454a44346db3cc08220d0a5
publicationDate 2004-06-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-6756087-B2
titleOfInvention Method for removing organic compound by ultraviolet radiation and apparatus therefor
abstract An organic polymer film can be completely decomposed and removed from a substrate surface by exposing the film to ultraviolet radiation having a wavelength of 180 nm or less. Also, ultraviolet radiation not longer than 180 nm in wavelength is scarcely transmitted through a transparent conductive oxide such as ITO and, thus, can be used for eliminating a defective polyimide alignment film formed on a color filter substrate and an array substrate having a transparent electrode pattern of ITO formed on the surface of a pigment portion and a TFT structure, respectively. According to the present invention, the defective alignment film on the substrates can be removed completely without any damage such as discoloring of the pigment portion and/or changing the TFT characteristics.
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priorityDate 1998-12-25-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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