| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d5d04736b0b882a4f5a1e0e0e4cd8cbb |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76229
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31053
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09C1-68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-762
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 |
| filingDate |
2001-04-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2004-05-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_953e1004c776976d426079451568c5fd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4d3a61f7bfa21f36c223e16b5beb2725 |
| publicationDate |
2004-05-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6733553-B2 |
| titleOfInvention |
Abrasive composition for polishing semiconductor device and method for producing semiconductor device using the same |
| abstract |
The present invention can provide an abrasive composition for polishing a semiconductor device which composition contains water, microparticles of an abrasive, and a chelating agent, wherein the abrasive is cerium oxide; the microparticles of cerium oxide have an average particle size of 0.01-1.0 mum and which composition is used for suitably forming a shallow trench isolation structure in a well-controlled manner during planarization of a semiconductor device including element-isolated structure. The invention also provides a method for producing the semiconductor device by use of the abrasive composition. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005062016-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6863592-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7452815-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005227491-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008115423-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007074457-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010204082-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006258267-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6953389-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8293696-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6930054-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007004050-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008125017-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008104893-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009156008-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004033764-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004244911-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009056231-A1 |
| priorityDate |
2000-04-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |