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Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3a62c92e56568bd104089aac22ca487b |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-3171
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-12044 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-53295
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-5329
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76801
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76807
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76832 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-31 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-532 |
| filingDate |
2001-03-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2004-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_709fa93c23a12535325271e1a74a9bea
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_97b22a44542905014bf649b2d9a83c11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_07db0165610c27310062a1f1aba2529d |
| publicationDate |
2004-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6713874-B1 |
| titleOfInvention |
Semiconductor devices with dual nature capping/arc layers on organic-doped silica glass inter-layer dielectrics |
| abstract |
Degradation of organic-doped silica glass low-k inter-layer dielectrics during fabrication is significantly reduced and resolution of submicron features is improved by the formation of dual nature capping/ARC layers on inter-layer dielectric films. The capping/ARC layer is formed in-situ on the organic-doped silica glass inter-layer dielectric. The in-situ formation of the capping/ARC layer provides a strongly adhered capping/ARC layer, formed with fewer processing steps than conventional capping and ARC layers. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8450854-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8084862-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9754822-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004259381-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7265437-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10840134-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10727350-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009079075-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005224986-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6989601-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006202311-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6953745-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7498254-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009079076-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7998880-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010283157-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008188074-A1
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10269627-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7224068-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-100576530-C
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010028695-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9484248-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009081418-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007148826-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11328952-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10199500-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2007044305-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8003524-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11374127-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11777035-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7944055-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005029010-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7199044-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009155996-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010207276-A1 |
| priorityDate |
2001-03-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |