http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6680158-B2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0606c8e113c860d8a6c41e2aaaf3120d |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0007 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 |
| filingDate | 2001-07-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2004-01-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b78c265705f7cc3a35911a9c7f8bcfe9 |
| publicationDate | 2004-01-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-6680158-B2 |
| titleOfInvention | Radiation-sensitive resin composition for spacer |
| abstract | The present invention relates to a radiation-sensitive resin composition for spacer is a copolymer comprising derivative units, an addition polymerizable monomer having at least one ethylenically unsaturated double bond, radiation-sensitive initiator and solvent, wherein said copolymer comprising (a1) 5 wt %-50 wt % of unsaturated carboxylic acid monomer derivative unit; (a2) 10 wt %-70 wt % of epoxy-containing unsaturated monomer derivative unit; and (a3) 0 wt %-70 wt % of copolymerizable unsaturated monomer derivative unit other than the above monomer derivative units (a1) and (a2). The content of said copolymer [A] which has a molecular weight of 800-7,000 and which has a molecular weight of greater than 70,000 are determined to account for 10 wt %-23 wt % and less than 5 wt %, respectively, based on the total weight of said copolymer[A]. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100594396-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8278021-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8519408-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009030103-A1 |
| priorityDate | 2001-07-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 248.