http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6669870-B2
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6a6c760472ee4c29e9cd26152ace2eb0 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-18 |
filingDate | 2001-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2003-12-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ca3cea4b606983fc77a3daee781c7b30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_54239eee227ea489b2d346bb93e2f8f3 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_52ca99dc677633d568cc23e46a3ddb32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c173beab7da4ee3a76d53501fd4466b2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ca5a5ec2a4811b098bdf2bbbd4570f9a |
publicationDate | 2003-12-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | US-6669870-B2 |
titleOfInvention | Substituted phenylethylene precursor synthesis method |
abstract | A Cu(hfac) precursor with a substituted phenylethylene ligand has been provided. The substituted phenylethylene ligand includes bonds to molecules selected from the group consisting of C1 to C6 alkyl, C1 to C6 haloalkyl, C1 to C6 phenyl, H and C1 to C6 alkoxyl. One variation, the alpha-methylstyrene ligand precursor has proved to be stable a low temperatures, and sufficiently volatile at higher temperatures. Copper deposited with this precursor has low resistivity and high adhesive characteristics. A synthesis method has been provided which produces a high yield of the above-described precursor. |
priorityDate | 1998-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 58.