| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76838
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66181 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-0805 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-334 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-822 |
| filingDate |
2003-03-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2003-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0e7a6d6806784e2f36ef855d2dd76039 |
| publicationDate |
2003-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6664581-B2 |
| titleOfInvention |
Damascene capacitor having a recessed plate |
| abstract |
A damascene capacitor structure includes a recessed capacitor plate for preventing leakage and dielectric breakdown between the capacitor plates of the capacitor structure on the surface of the trenches and in the bottom corners of the trenches. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013020677-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8004061-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7309639-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10766119-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8546914-B2 |
| priorityDate |
2001-03-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |