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filingDate 2002-12-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationNumber US-6656799-B2
titleOfInvention Method for producing FET with source/drain region occupies a reduced area
abstract A semiconductor device having a device separation region and an active region includes a gate oxide film, a source/drain region, and an electrode which is electrically coupled to the source/drain region. The active region is in contact with the gate oxide film at a first face, a portion of the source/drain regions being located above the first face. The electrode is in contact with the source/drain region at a second face, the second face constituting an angle with respect to the first face.
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