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filingDate 2001-09-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d0bbca802a0f122f3e60e309e4300b43
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publicationDate 2003-11-25-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-6654535-B2
titleOfInvention Polyimide optical waveguide
abstract An optical waveguide is produced by forming on a substrate a waveguide layer and/or a clad layer containing, as their main ingredient, polyimide with a fluorine substitution rate of 30% or higher (thus as a fluorinated polyimide layer), with a primer layer laid in between that contains, as its main ingredient, polyimide with a fluorine substitution rate of 10% or lower (including 0%). This improves adherence of the fluorinated polyimide layer to the substrate and prevents the fluorinated polyimide layer from peeling off the substrate. For more effective prevention of such peeling-off and of warping of the substrate, the primer layer is preferably formed to have a thickness of 0.1 to 20 mum. The primer layer may contain a coupling agent.
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