| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_02cfb0f1aa2718c61bdf184d53adfe79 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-31794 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-70708
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-707
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3174
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-317
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-305 |
| filingDate |
2000-10-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2003-11-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6a3d6b02d75942a6da48cc6ffbe81250 |
| publicationDate |
2003-11-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6653639-B1 |
| titleOfInvention |
Chuck for mounting reticle to a reticle stage |
| abstract |
A lithography system for processing a substrate is disclosed. The lithography system includes a stage for moving the substrate relative to a beam. The lithography system further includes a chuck for securely holding the substrate during stage movement. The lithography system additionally includes a support assembly for holding the chuck in a fixed position relative to the stage while accommodating for deformations in either the chuck or the stage during processing so as to precisely locate the substrate relative to the stage and to reduce external stresses that cause substrate distortions. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I564678-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100882893-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005140962-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9805906-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007165357-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7875528-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7119884-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9817208-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008188036-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005182143-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008193201-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9857694-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7786607-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105225908-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7025498-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005088639-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2005064400-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004240513-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7542263-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014374626-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005186517-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9070535-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2005064400-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105225908-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2005106557-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100882892-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6961119-B2 |
| priorityDate |
2000-10-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |