| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5526c8c92ab2378973e3ba853e04bd9d |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-14 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C12N11-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C12N11-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C12M1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-308
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-32 |
| filingDate |
1997-08-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2003-11-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_398c470a2aea86241cb07849a0081734
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b8923b62afe9fe8112f613eb884bfc92
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a064fe8d2f02b7d9c4ca4c179c192edb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d621248afcb337814a00904c9a77ec48 |
| publicationDate |
2003-11-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6645744-B2 |
| titleOfInvention |
Baths for producing microstructures |
| abstract |
A bath for generating microstructures which is required in numerous fields of application of the microsystem technique and in microstructuring offers a less expensive alternative to known conventional approaches and disposal of the used bath may be carried out in a manner more environmentally friendly manner than in the previous methods for manufacture of microstructures. The bath includes at least one biogenic agent (in particular, an enzyme) which acts upon a preselectable thin layer. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7713053-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006277778-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010221488-A1 |
| priorityDate |
1996-08-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |