| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1a34d7d2e0d09a58cb7bf4a04c81162e |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-259
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2201-0116
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-249978
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2201-0209 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02343
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K1-162
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02203
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02216
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02118
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31695 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L-
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08J9-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K1-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B5-16 |
| filingDate |
2002-07-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2003-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6b40cb9e1e5cd1e8a9319dbc243adf7c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a79435d36b2713a722556f31292962fc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f05a9a3cb7f433346f1cd6959a08ed42 |
| publicationDate |
2003-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6627669-B2 |
| titleOfInvention |
Low dielectric materials and methods of producing same |
| abstract |
In accordance with the present invention, compositions and methods are provided in which the mechanical strength and durability of a precursor material having a plurality of pores is increased by a) providing a precursor material; b) treating the precursor material to form a nanoporous aerogel, preferably by using a supercritical drying process; c) providing a blending material having a reinforcing component and a volatile component; d) combining the nanoporous aerogel and the blending material to form an amalgamation layer; and e) treating the amalgamation layer to increase the mechanical strength of the layer by a substantial amount, and to ultimately form a low dielectric material that can be utilized in various applications. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11090711-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10981216-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006125158-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8021583-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004016962-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11077487-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7635411-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010140840-A1 |
| priorityDate |
2000-06-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |