patent/US-6627052-B2

http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6627052-B2

Outgoing Links

Predicate	Object
assignee	http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947
classificationCPCAdditional	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D7-123
classificationCPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2885 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D17-001
classificationIPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D7-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-288
filingDate	2000-12-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate	2003-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor	http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c1955bdc882cdf870285786817ae5abe http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fb7e56d9d38e4f459e4c4764ccb751de http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f11927089c85ae752455b35976d96131
publicationDate	2003-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	US-6627052-B2
titleOfInvention	Electroplating apparatus with vertical electrical contact
abstract	An electrodeposition apparatus for depositing material on a surface of a substrate. The electrodeposition apparatus includes at least one contact for vertically contacting the substrate and providing electrical connection to the substrate. The at least one contact does not scratch the surface of the substrate to be plated. A voltage source is connected to the at least one contact.
isCitedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9822461-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-RE40218-E http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11542630-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10053792-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10053793-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9909228-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10416092-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8172992-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011181000-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011233056-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10066311-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9221081-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6755946-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10092933-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7935231-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7780824-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006283704-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9476139-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9746427-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017096745-A9 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8377268-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009107835-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10435807-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10920335-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6926813-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10538855-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7985325-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11549192-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10017869-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003121790-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9512538-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9988734-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9228270-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010155254-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10087545-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8398831-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10023970-B2
priorityDate	2000-12-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type	http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

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isDiscussedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID135942679 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID727

Total number of triples: 62.