| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_38ed56a4b4e8e2315b2b3308bffedb3f |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66825
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-40114
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-42324 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-423
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 |
| filingDate |
2002-02-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2003-09-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_efa48f3686cda3554573de107f21ae3c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_89eacb4ad86a25fd597e6f0966ebb8a5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9256729f2c9386364934ddb58154f602
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bbc5bc2e28dace734b35ba95ac8e0e41 |
| publicationDate |
2003-09-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6624466-B2 |
| titleOfInvention |
Implant method for forming Si3N4 spacer |
| abstract |
A method is disclosed to form a reliable silicon nitride spacer between the lower edges of the floating gate and the control gate of a split-gate flash memory cell. This is accomplished by forming a floating gate with vertical sidewalls, forming a high temperature oxide layer followed by silicon nitride layer over the floating gate including the vertical sidewalls, ion implanting the nitride layer and then selectively etching it to form a robust silicon nitride spacer of well defined rectangular shape. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010081246-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6908813-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010171180-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005020022-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004203205-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6902971-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7763510-B1 |
| priorityDate |
1999-04-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |