| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_260220c525b214105ee48ee2d77a5bf4 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31695
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02203
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02216
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02337
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02343
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 |
| filingDate |
2001-09-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2003-08-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eee171726273f82c798aea2bdc62b21e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9f481f9e55bfc083a8834e3c43f6fec1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ff21f2e5c64caeb76f4fef1dbdf1ccc5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bd041d4d258f288e98aedf64ecba12c1 |
| publicationDate |
2003-08-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6610145-B2 |
| titleOfInvention |
Deposition of nanoporous silica films using a closed cup coater |
| abstract |
A process for forming a uniform nanoporous dielectric film on a substrate. The process includes horizontally positioning a flat substrate within a cup; depositing a liquid alkoxysilane composition onto the substrate surface; covering the cup such that the substrate is enclosed therein; spinning the covered cup and spreading the alkoxysilane composition evenly on the substrate surface; exposing the alkoxysilane composition to water vapor and base vapor to thereby form a gel; and then curing the gel. The invention also provides an apparatus for spin depositing a liquid coating onto a substrate. The apparatus has a cylindrical cup with an open top section and removable cover which closes the top. A vapor injection port extends through the center of the cover. Suitable means hold a substrate centered within the cup and spin the cup. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011223329-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006286813-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10822807-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7642199-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11649639-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8734906-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8993063-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7919145-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11313133-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007148435-A1 |
| priorityDate |
1998-08-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |