| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c72d118f5664072de841f9c5c34b9d99 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32724
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32055 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 |
| filingDate |
2001-04-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2003-08-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0cd2f8e2ea5c285aff61352d00931d27
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_04456062c31cdfe86bfb6bde4d56920d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2f367b0640e07e7f18b86fd898b272f9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6697df8da6ac34f7c98f5404b78fef2d |
| publicationDate |
2003-08-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6608432-B2 |
| titleOfInvention |
Cathode target mounting for cathodic arc cathodes |
| abstract |
An apparatus for cathodic arc coating. The apparatus includes: a vacuum chamber which includes an anode; a power supply; and a cathode target assembly connected to the power supply. The cathode target assembly includes a cathode target and a target holder. In the preferred embodiment, a conductive interlayer is located between the cathode target and the target holder, and a cooling block is in contact with the cathode target. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010143232-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010131023-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2008101107-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009045045-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011073471-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009242397-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005121994-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008138529-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7173359-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8387561-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3236524-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8088260-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7879203-B2 |
| priorityDate |
2001-04-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |