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titleOfInvention Method of making thin films dielectrics using a process for room temperature wet chemical growth of SiO based oxides on a substrate
abstract Disclosed is a room temperature wet chemical growth (RTWCG) process of SiO-based insulator coatings on silicon substrates for electronic and photonic (optoelectronic) device applications. The process utilizes a mixture of a silicon source, a pyridinium compound, an aqueous redox solution, and a homogeneous aqueous solution.
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