| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28556
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4586
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45557
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76877
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67103 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-458
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate |
2001-05-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2003-05-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1add66d1c5f2724155b77379e53e0f91
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e5018eccaf78bdd9f764ab57cd98f70b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b06f1606db14358bb3eb4aa46db84b5d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3a1f7bd96e93627bee46a641f8ae2edc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1d850658907458edf2e1e3bb1e35d514
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_78428cb7df3d35cfcaab1f600bfaa4d1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f4ecdd8cad09676ead9230291787f03c |
| publicationDate |
2003-05-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6559039-B2 |
| titleOfInvention |
Doped silicon deposition process in resistively heated single wafer chamber |
| abstract |
A method for depositing doped polycrystalline or amorphous silicon film. The method includes placing a substrate onto a susceptor. The susceptor includes a body having a resistive heater therein and a thermocouple in physical contact with the resistive heater. The susceptor is located in the process chamber such that the process chamber has a top portion above the susceptor and a bottom portion below the susceptor. The method further includes heating the susceptor. The method further includes providing a process gas mix into the process chamber through a shower head located on the susceptor. The process gas mix includes a silicon source gas, a dopant gas, and a carrier gas. The carrier gas includes nitrogen. The method further includes forming the doped silicon film from the silicon source gas. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003173790-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7048488-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004185668-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009065816-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7517141-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005004523-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8758633-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008025369-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7074698-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6864161-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7181132-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7104578-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005214445-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003180125-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6802906-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7385249-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11781212-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002127508-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005095766-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6835039-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022325400-A1 |
| priorityDate |
2001-05-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |