| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a722744e77c81c5f5cf415087e2ee92b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8381805eba6d034fc77bd230dd02e6e2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a4caf8fd92460813a3b9e764a81031b2 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-167
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-32 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-16 |
| filingDate |
2000-01-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2003-01-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dde1b353372cf9afad17169e56e2ef5f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_70a1de809d0ef2e0194e614e54fc1681
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_350b907b4d1d6e98ed312b13002133e0 |
| publicationDate |
2003-01-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6509138-B2 |
| titleOfInvention |
Solventless, resistless direct dielectric patterning |
| abstract |
Processes for patterning radiation sensitive layers are disclosed. In one embodiment, the process includes depositing a radiation sensitive material on a substrate by chemical vapor deposition. The radiation sensitive material is exposed to radiation to form a pattern and the pattern is developed using a supercritical fluid (SCF). |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005090114-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7029832-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004180299-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005112382-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007065756-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7431969-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007032620-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7141692-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6673521-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6955939-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007023038-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011010939-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003101993-A1 |
| priorityDate |
2000-01-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |