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filingDate 2000-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2002-12-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-6494095-B1
titleOfInvention Micro electromechanical switch for detecting acceleration or decelaration
abstract A micro electromechanical switch for detecting acceleration or deceleration includes a rectangular planar mass of, for example, etched silicon suspended on a pair of beams from an anchor located in the same silicon base. Motion in a plane of movement caused by acceleration or deceleration is detected by a pair of photodiodes and a light emitting diode located on opposite sides of the planar mass or shutter so that when the shutter moves the interruption of the light is sensed and thus acceleration or deceleration is indicated.
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Total number of triples: 50.