| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2fa4090e6cd917662df0b1a47dad8c68 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N50-01
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N50-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01F41-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01F41-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y25-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01F41-308 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01F41-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01F41-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L43-12 |
| filingDate |
1997-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2002-11-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d001f7d86acb2b7e7618f7d5faaa40b4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ce0258afe3e89719dbd9a1dda2563607
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8279bdd68886dcd9165449d775cd147d |
| publicationDate |
2002-11-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6482329-B1 |
| titleOfInvention |
Method for manufacturing magnetoresistance element |
| abstract |
A method of manufacturing a magnetoresistance element which can reproduce magnetic signals with higher sensitivity. The manufacturing method includes the steps of providing a vacuum below 10-9 Torr in a film forming chamber for forming a nonmagnetic layer and ferromagnetic layer; performing plasma-etching of the surface of a substrate body by using a mixture of a gas (a) containing at least oxygen or water introduced into the chamber and an Ar gas (b) introduced into the chamber in a vacuum, state controlled to higher than 10-9 Torr; and forming the nonmagnetic and ferromagnetic layers on the etched substrate body by sputtering a prescribed target by using the mixture of the gases (a) and (b). |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10448940-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008067063-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7932548-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7733613-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006249370-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6962648-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009104345-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005231857-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7418777-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6826825-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11510663-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005183945-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009314740-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006072250-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002095767-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8395199-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008068763-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7542247-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7312958-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008055785-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005056534-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005056535-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8308915-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007131538-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2005028700-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7463458-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8454810-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8911602-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8119018-B2 |
| priorityDate |
1997-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |