| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_674ab213451266a67a66f303ef02deb0 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1642
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1645
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1631
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1646
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-2047
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-077
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-082
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-161
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-14233 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-332
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-317
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-16 |
| filingDate |
2000-01-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2002-11-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7688c6a6f2d2bc065124f2cfd64e18ff |
| publicationDate |
2002-11-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6478412-B1 |
| titleOfInvention |
Piezoelectric thin film device, its production method, and ink-jet recording head |
| abstract |
The present invention provides a piezoelectric thin film element comprising a piezoelectric thin film having a uniform specific shape, a process for producing the same, and an ink jet recording head using the piezoelectric thin film element.A piezoelectric thin film element (1) comprises a substrate (5), a lower electrode (2), a piezoelectric thin film (3) and an upper electrode (4) in this order. A vertical cross-sectional shape and/or a vertical longitudinal sectional shape of the piezoelectric thin film (3) with respect to the substrate (5) is a quadrilateral having upper and lower sides mutually facing and substantially parallel to each other and both lateral sides. A length Lu of the upper side and a length Lb of the lower side preferably satisfy the relationship of Lu>Lb. Angles thetal and thetar defined between the lower side and the respective lateral sides are expressed as follows: 90°<thetal<150° and 90°<thetar<150°. The piezoelectric thin film is formed by photo-fabrication using a photosensitive composition capable for forming a ferroelectric thin film. An ink jet recording head using said piezoelectric thin film element. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008008825-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7067961-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005104009-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019181963-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011239422-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003048041-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8048493-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7208324-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006046320-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004141033-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008018716-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004007947-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7042136-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7014300-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005099100-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011298335-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7717546-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7202485-B2 |
| priorityDate |
1999-01-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |