| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_44b2ac87aeadb161b83426d9cf6c4bdc |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G11B5-3163
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G11B5-3166
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G11B5-3133 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G11B5-31 |
| filingDate |
2000-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2002-10-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8dc2e8f508febea779167d1a5fef2c03
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d719d659156db3365ad9411f8ba09b83 |
| publicationDate |
2002-10-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6465149-B2 |
| titleOfInvention |
Solution to be optically treated, a method for forming an antireflection film, a method for pattern-plating and a method for manufacturing a thin film magnetic head |
| abstract |
A solution to be optically treated including a cyclopentanone solvent, polymethylglutarimide and a light absorption dye is applied onto a body to be plated 100 including an inclined portion 200 , and thereafter, is thermally treated to form an antireflection film 300 . Then, a photoresist 400 is applied so as to cover the antireflection film. Subsequently, a photolithography process to form a plate-pattern on the body to be plated is carried out for the photoresist 400 and the antireflection film 300. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014349071-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002160312-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004234896-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7175972-B2 |
| priorityDate |
1999-04-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |