| abstract |
A combinatorial X-ray diffractor, particularly a combinatorial X-ray diffractor which can measure one row of samples among a plurality of samples arranged into a matrix simultaneously by X-ray diffraction. For the purpose of high throughput screening, a plurality of samples ( 10 ) are arranged into a row X 1 , a row X 2 , a row X 3 , and a row X 4 on a sample stage and samples in each row are measured simultaneously by X-ray diffraction, measured data are processed by an information processor ( 20 ), information data useful for the evaluation of thin film material are automatically extracted and arranged and the extracted and arranged information data are displayed on a display apparatus ( 27 ). |