http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6458290-B1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c3a2f00e72ba6e4c09b6da573427fbed |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31053 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3105 |
| filingDate | 2000-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2002-10-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6c1f023d8928f80b228ea60874ad4ae9 |
| publicationDate | 2002-10-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-6458290-B1 |
| titleOfInvention | Isolation and/or removal of ionic contaminants from planarization fluid compositions using macrocyclic polyethers |
| abstract | The present invention provides fluid compositions for use in the planarization of a substrate surface. Fluid compositions include a planarization slurry having an abrasive component and a chemically interactive component and an effective amount of at least one crown ether that is capable of isolating at least one charged ion contaminant specie in the planarization slurry. Also included are fluid compositions that are pre-treated with an effective amount of at least one crown ether to remove one or more charged ion contaminants in the fluid composition utilized in a planarization process. Methods of using the fluid compositions are also provided. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-101955731-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2011006348-A1 |
| priorityDate | 1998-09-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 100.