| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76251
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76895
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76898 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-762 |
| filingDate |
2001-08-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2002-09-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3c7d4631ee65783244cb19a9b1c15b0b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e0c5e12eb1b9e170dabed8897ce11a10 |
| publicationDate |
2002-09-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6451634-B2 |
| titleOfInvention |
Method of fabricating a multistack 3-dimensional high density semiconductor device |
| abstract |
A multistack 3-D semiconductor structure comprising a first level structure comprising a first semiconductor substrate and first active devices; and a second level structure comprising a SOI semiconductor structure bonded to the first level structure and further comprising second active devices; and wherein the first active devices are more heat tolerant than the second active devices is provided along with a method for its fabrication. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7438482-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10047257-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8026610-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005259925-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7545008-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009283914-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7202140-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007181947-A1 |
| priorityDate |
2000-01-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |