| abstract |
A robust single-chip hydrogen sensor and a method for fabricating such a sensor. By adding an adhesion-promoting layer between the body of a sensor and an on-chip hydrogen-exposed electrically-resistive hydrogen-sensing element, device yields are improved when compared to directly applying the electrically-resistive hydrogen-sensing elements to the sensor body. The resistance of the sensing element is indicative of the hydrogen in the medium surrounding the sensor. According to a preferred embodiment of the present invention, the adhesion-promoting layer is a chromium (Cr) adhesion layer, and the hydrogen-exposed electrically resistive hydrogen sensing element is a PdNi alloy. |