| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a8a9982b1666c54b5bf02d6c944891e4 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03B2201-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03B2201-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C2201-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-265
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01P2006-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C2201-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01P2006-60 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03B19-1453
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C3-045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C3-111
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B21-0821
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03B32-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C3-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C3-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03B19-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03B32-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B6-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-13357
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C17-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B21-082 |
| filingDate |
2002-02-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2002-09-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eb3c6e90a7980e111f23923f5cdcc858
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7b7e9b27bb80db2db3de2284de713b83
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_811b4568997d358bc66bcb1f35dbc92f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5270d04ff9d5d7db4c9b7abd7c52347f |
| publicationDate |
2002-09-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6449420-B1 |
| titleOfInvention |
Germanium silicon oxynitride high index films for planar waveguides |
| abstract |
A composition represented by the formula Si1-xGexO2(1-y)N1.33y, wherein x is from about 0.05 to about 0.6 and y is from about 0.14 to about 0.74 exhibits properties highly suited for use in fabricating waveguides for liquid crystal based optical devices. In particular, the compositions have an index of refraction of from about 1.6 to about 1.8 for light at a wavelength of 1550 nm, and/or a coefficient of thermal expansion of from about 2.5x10-6°C-1 to about 5.0x10-6° C.-1. The compositions also have inherently low hydrogen content, and a high hydrogen permeability which allows better hydrogen removal by thermal annealing to provide a material which exhibits low optical losses and better etching properties than alternative materials. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8521038-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008145978-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9523804-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007205706-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8986922-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8786950-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9065572-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8432611-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7965949-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7903338-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7901870-B1 |
| priorityDate |
1999-11-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |