patent/US-6448158-B2

http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6448158-B2

Outgoing Links

Predicate	Object
assignee	http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_75fb18e292271cd11cd8a64e61512c58
classificationCPCAdditional	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E10-50
classificationCPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-1884
classificationIPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-18
filingDate	2001-06-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate	2002-09-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor	http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_207106d5225716af33fd7fc9f7d8fc60 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6d54c0bf25e8db9b3fee36b2545438b6
publicationDate	2002-09-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	US-6448158-B2
titleOfInvention	Method of patterning an ITO layer
abstract	A method of patterning an indium tin oxide (ITO) layer is performed on a glass substrate. First, using sputtering, an amorphous ITO layer is deposited on the glass substrate. Then, using excimer laser annealing (ELA), the amorphous ITO layer within a predetermined pattern is turned into a crystalline ITO layer. Finally, using an etch solution, the amorphous ITO layer outside the predetermine pattern is removed.
isCitedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7586572-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7825021-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11742458-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7342637-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11411139-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9337366-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101506734-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004128300-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I424479-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009221141-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100556346-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I384551-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7026619-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8373339-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011096270-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9378953-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005197030-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008164472-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8610857-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009273752-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011195247-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006046460-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9282645-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10756236-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9343310-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7887710-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7994029-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006146220-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103178184-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014196802-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9046722-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105103093-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7517620-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014043992-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2746845-A4 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2746845-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004125280-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005149685-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10084114-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005184240-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-03059532-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105103093-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003184688-A1
priorityDate	2000-08-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type	http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate	Subject
isCitedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6071796-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5574293-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6184068-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6297086-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6329229-B1
isDiscussedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419544408 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID447604988 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419474387 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID971 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID57350325

Total number of triples: 67.