| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_aa67eb74ea5b96d9f8f2cfdb3b025770 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2253-106 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-0805
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J20-10 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-20 |
| filingDate |
2000-09-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2002-09-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c2d2cbe13c76fe0422f9ec03251388b3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_06e6029a3360263fa111f49a94fb5325 |
| publicationDate |
2002-09-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6444013-B1 |
| titleOfInvention |
Purification of methylsilanes |
| abstract |
A process for purifying methylsilane is described. Methylsilane containing impurities such as carbon dioxide, chlorosilane and atmospheric gases is fed from a source container unit to an adsorption unit at -40° C. The adsorption unit is connected to a collection unit at -190° C. where the purified methylsilane is transported and can be stored. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006011219-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9073953-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7462221-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006225571-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7306652-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005054211-A1 |
| priorityDate |
2000-09-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |